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Aperlena

TED - Tenders Electronic Daily (Publications Office of the EU) verified 4 days ago Contract notice

Single Chamber Cleaning Tool (IZM-137) for semiconductor manufacturing

Original Deutschland - Mikroelektronische Maschinen und Geräte - Single Chamber Cleaning Tool (IZM-137) - PR1094599-3460-P

Open Germany Dresden Electrical machinery

Buyer Fraunhofer-Gesellschaft - Einkauf B12

Key facts

Published
Competition
Open race
  1. Published

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The Aperlena Verdict

Open race

No supplier dominates: 24 different companies have won the last 30 comparable contracts from this buyer over 5 years. This is a genuinely open race.

Based on 30 comparable awards by this buyer in this sector over 5 years. Every verdict is recorded before the outcome and graded against the award notice. How we score ourselves.

Summary

Machine-generated summary

Supply of one Single Chamber Cleaning Tool, a wet chemical cleaning system for semiconductor manufacturing. The system includes media supply units, spray and rinse modules and ionisation units for precise control and monitoring of process parameters. It cleans photomasks, wafer substrates mounted on film frames and round wafers of 200 mm and 300 mm diameter, using Piranha and SC1 chemical solutions supported by ultrasonic motion or brush-assisted cleaning to remove organic residues, particles and surface contamination. The aim is removing particles larger than 250 nm for i-Line lithography applications. Optional features include a vertical rotating brush system with programmable dosing arm, chemically resistant brushes, adjustable flow and pressure with programmable alarm limits, brush self-cleaning cycles and safety interlocks.

Description

Single Chamber Cleaning Tool (IZM-137) 1x Single Chamber Cleaning Tool Diese Spezifikation beschreibt die Komponenten und Funktionen eines Nasschemikalien-Reinigungssystems für die Halbleiterfertigung. Das System umfasst verschiedene Medienversorgungseinheiten, Sprüh- und Spülmodule sowie Ionisierungseinheiten zur präzisen Steuerung und Überwachung der Prozessparameter. Das System unterstützt die Reinigung von Fotomasken, auf Filmrahmen montierten Wafer-Substraten sowie runden Wafern mit 200 mm und 300 mm Durchmesser. Diese Reinigungsprozesse verwenden Piranha- und SC1-Chemikalienlösungen und werden durch Ultraschallbewegung oder bürstenunterstützte Reinigung ergänzt, um eine gründliche Entfernung von organischen Rückständen, Partikeln und Oberflächenverunreinigungen zu gewährleisten. Das Ziel ist die Entfernung von Partikeln mit einer Größe von >250 nm zur Unterstützung von i-Line-Lithografieanwendungen. Optionale Features: -Extreme Verformung und Durchbiegung im Bereich von 1500 bis 2500 µm -Verbesserte Entfernung von Partikeln und Rückständen durch direkten Oberflächenkontakt mithilfe eines vertikalen Rotationsbürstensystems -Bewegungsgesteuerter vertikaler Bürstenkopf -Chemisch beständiges Bürstenmaterial, geeignet für aggressive Medien -Verwendete Medien: DI-Wasser, SC1 (NH₄OH, H₂O₂), Piranha (H₂O₂ / H₂SO₄), nicht temperaturgesteuert -Durchfluss und Druck einstellbar und überwachbar: elektronische Anzeige mit programmierbaren Alarmgrenzen -Präzise geführte Bewegung für gleichmäßige Reinigungsleistung über die gesamte Substratoberfläche -Dosierarm: Programmierbare Bewegung (Steuerung von Start-/Endpunkt, -Scangeschwindigkeit, Drehzahl, Bürstenhöhe, Bürstendruck mit Kraftrückmeldung) -Programmierbare Bürsten-Selbstreinigungszyklen nach jedem Programm und während Inaktivitätsphasen (DI-Wasserspülung zur Verhinderung von Medienkristallisation) -Sicherheitsmerkmale: Programmierbare Alarmgrenzen mit Software-Verriegelung zur Prozesssteuerung -Lagerung von CO₂-Gasflaschen (2-6 kg, geeignet für die interne Chemikalienversorgung/Werkzeuglagerung) -Funktion: Kontrollierte CO₂-Injektion für -Leitfähigkeitsbereich: 5-15 µS, stabil bis ±20 % -Filtration: 0,003 µm CO₂-Gasfilter -Softwaregesteuerte Alarmgrenzen und Einstellungen -Bürstenunterstützte DI-Wasser-, SC1- oder Piranha-Reinigung auf der Vorderseite mit DI-Wasserreinigung auf Vorder- und Rückseite, N2-unterstütztes -Schleudertrocknen

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 4 days ago

What this market pays

The buyer has too few awards of its own in this sector, so this is the range of the last 208 awards for Electrical machinery in Germany.

Median award
€375,007
Middle half of past awards
€219,860 to €672,900

TED - Tenders Electronic Daily (Publications Office of the EU) publishes no value for this notice, so it has no mark on the scale. The official documents may state one.

Award values as published by the official sources. Use them as a guide, not a rule: scope, lots and duration differ between contracts.

Fraunhofer-Gesellschaft - Einkauf B12

Germany

notices in the register
715
awards
329
awarded in total
€1.3M

Who wins its contracts

Many suppliers
different companies won its awards
229
of the awards went to the three most frequent winners
6%
of its calls state an estimated value
0%

Based on 290 awards with a named winner over the last 3 years. Counted by award, not by value, because lot and framework amounts are not comparable. Concentrated means the three most frequent winners took 65% or more of the awards; many suppliers, under 35% with at least ten different winners.

Competition

tenders per lot on average (open and restricted procedures)
5.1
of those lots received a single tender
22%
of the awards went to companies based in another country
16%

As the official award notices state them, over the last 3 years. Tenders per lot count open and restricted procedures only: in a negotiated procedure or a direct award a single tender is the procedure itself. The country is the one the notice gives for the winner.

Who usually wins this buyer's contracts in this sector

Company Wins Total awarded Last win
EV Group E. Thallner GmbH 3 Jul 2026
Applied Materials GmbH 2 Oct 2026
EKRA Automatisierungssysteme GmbH 2 Jul 2026
Evatec Europe GmbH 2 May 2026
Veeco GmbH 2 May 2026

Based on 30 awards with a linked company profile over the last 5 years.

165 open tenders right now

Market context

TED - Tenders Electronic Daily (Publications Office of the EU) publishes no value for this notice, so it cannot be placed among the open notices of its sector. The official documents may state one.

open now in Electrical machinery
3,701
median open notice
€448,600

Who wins in this market

Many suppliers

Germany · Electrical machinery

different companies won awards here
476
of the awards went to the three most frequent winners
5%
buyers awarded contracts here
303

Based on 592 awards with a named winner over the last 3 years. Counted by award, not by value, because lot and framework amounts are not comparable. Concentrated means the three most frequent winners took 65% or more of the awards; many suppliers, under 35% with at least ten different winners.

Competition

tenders per lot on average (open and restricted procedures)
3.3
of those lots received a single tender
34%
of the awards went to companies based in another country
13%
of the tenders came from another country
10%

As the official award notices state them, over the last 3 years. Tenders per lot count open and restricted procedures only: in a negotiated procedure or a direct award a single tender is the procedure itself. The country is the one the notice gives for the winner.

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