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TED - Tenders Electronic Daily (Publications Office of the EU) verified 1 week ago Contract notice

Germany - Various machines and equipment for special purposes - PVD metal system for QMI connection (IPMS-MRS12.1) - PR926027-2480-P

Original Deutschland - Diverse Maschinen und Geräte für besondere Zwecke - PVD metal system for QMI connection (IPMS-MRS12.1) - PR926027-2480-P

Closed Germany Dresden Industrial machinery

Buyer Fraunhofer-Gesellschaft - Einkauf B12

Key facts

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  1. Published
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Summary

Machine-generated summary

The buyer is procuring one PVD metal system for QMI connection (IPMS-MRS12.1), equipment for sputtering AlCu, Al, Ti/TiN and back-etching in independent chambers with planar targets over 200 mm wafers. The system is required for two process line applications: deposition of a metal fill inside TSVs for advanced MEMS chiplet integration, and metal or frontside TSV fill deposition for QMI metallization systems. In both applications conformal barrier deposition is required to achieve optimal contact quality. Optional items include a handling system able to run two sequences simultaneously, edge processing, quartz wafer processing, RF generators with auto-matching networks, a degassing station, a wafer buffer station, chuck temperature below 20 degrees C for etching, a 12 month warranty extension and a wear parts set.

Description

1 Stück PVD metal system for QMI connection (IPMS-MRS12.1) Ausrüstung für das Sputtern von AlCu, Al, Ti/TiN und das Rückätzen in unabhängigen Kammern mit planaren Targets über 200-mm-Wafern. Dieses System ist für zwei Prozesslinienanwendungen erforderlich. Eine Anwendung ist die Abscheidung einer Metallfüllung im Inneren von TSV für die fortschrittliche Integration von MEMS-Chiplets. Das zweite Anwendungsszenario ist die Metallsystem- oder Frontside-TSV-Füllungsabscheidung für QMI-Metallisierungsysteme. In beiden Anwendungen ist die konforme Abscheidung der Barriere erforderlich, um eine optimale Kontaktqualität zu erzielen. Optionale Leistungspositionen: 2.4 Handlingsystem Das Werkzeug ist in der Lage, zwei verschiedene Sequenzen gleichzeitig zu bearbeiten. ja/nein 2.9 Handlingsystem Möglichkeit zur Kantenbearbeitung ja/nein 3.6 Kassetten/Wafer-Spezifikationen Verarbeitung von Quarz-Wafern gemäß den oben genannten Spezifikationen ja/nein 4.5 Prozesssystem HF-Generatoren mit automatischem Anpassungsnetzwerk zum Anlegen einer Substratvorspannung in der Kammer für alle anderen Sputterkammern "100 - 600 W; ja/nein" 4.16 Prozesssystem Das Gerät ist mit einer Entgasungsstation ausgestattet. "Chuck temperature 200°C; yes/no" 4.17 Process System Das Gerät ist mit einer Wafer-Pufferstation ausgestattet. "Wafermenge im Puffer ≥6; ja/nein" 4.19 Prozesssystem Chucktemperatur in Prozesskammer für Prozess "Ätzen" "< 20°C; ja/nein" 19.6 Gewährleistungsverlängerung Verlängerung der Gewährleistung um weitere 12 Monate. ja/nein 21.9 Betriebszeit/Reparatur/Zuverlässigkeit Satz von Verschleißteilen (Lampen, O-Ringe, Ventile usw.) zur Abdeckung der Grundgarantiezeit ja/nein

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 week ago

Fraunhofer-Gesellschaft - Einkauf B12

Germany

notices in the register
714
awards
329
awarded in total
€1.3M

Who wins its contracts

Many suppliers
different companies won its awards
229
of the awards went to the three most frequent winners
6%
of its calls state an estimated value
0%

Based on 290 awards with a named winner over the last 3 years. Counted by award, not by value, because lot and framework amounts are not comparable. Concentrated means the three most frequent winners took 65% or more of the awards; many suppliers, under 35% with at least ten different winners.

Competition

tenders per lot on average (open and restricted procedures)
5.1
of those lots received a single tender
22%
of the awards went to companies based in another country
16%

As the official award notices state them, over the last 3 years. Tenders per lot count open and restricted procedures only: in a negotiated procedure or a direct award a single tender is the procedure itself. The country is the one the notice gives for the winner.

Awards most often to

  1. EV Group E. Thallner GmbH 8 awards
  2. Keysight Technologies 5 awards
  3. SENTECH Gesellschaft für Sensortechnik mbH 4 awards

45 open tenders right now

Market context

open now in Industrial machinery
1,879
median open notice
€157,000

Who wins in this market

Many suppliers

Germany · Industrial machinery

different companies won awards here
571
of the awards went to the three most frequent winners
4%
buyers awarded contracts here
303

Based on 707 awards with a named winner over the last 3 years. Counted by award, not by value, because lot and framework amounts are not comparable. Concentrated means the three most frequent winners took 65% or more of the awards; many suppliers, under 35% with at least ten different winners.

Competition

tenders per lot on average (open and restricted procedures)
2.3
of those lots received a single tender
41%
of the awards went to companies based in another country
16%
of the tenders came from another country
16%

As the official award notices state them, over the last 3 years. Tenders per lot count open and restricted procedures only: in a negotiated procedure or a direct award a single tender is the procedure itself. The country is the one the notice gives for the winner.

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