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Aperlena

TED - Tenders Electronic Daily (Publications Office of the EU) verified 2 days ago Contract notice

Germany - Microelectronic machines and equipment - BEoL Layer Transfer, fully automated (IZM-135) - PR1108543-3460-P

Original Deutschland - Mikroelektronische Maschinen und Geräte - BEoL Layer Transfer, fully automated (IZM-135) - PR1108543-3460-P

Open Germany Dresden Electrical machinery

Buyer Fraunhofer-Gesellschaft - Einkauf B12

Key facts

Published
Competition
Open race
  1. Published

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The Aperlena Verdict

Open race

No supplier dominates: 24 different companies have won the last 29 comparable contracts from this buyer over 5 years. This is a genuinely open race.

Based on 29 comparable awards by this buyer in this sector over 5 years. Every verdict is recorded before the outcome and graded against the award notice. How we score ourselves.

Summary

Machine-generated summary

A single fully automated BEoL (Back-End-of-Line) Layer Transfer machine is being procured. The system performs IR laser debonding of temporarily bonded wafer pairs, allowing silicon wafers to be used as temporary carriers instead of glass carriers with UV-laser release. It must process device wafers thinner than 20 µm carrying inorganic RDL first and BEoL layers, bonded to various silicon carrier wafers with different bonding layers. The wafer pairs are mounted on film frames transported in standard film frame cassettes. The system must fully automatically load frames from cassettes, align and read wafer IDs, handle frames in the laser debonding station, carry out laser treatment, and unload frames back into cassettes, with parallel processing for high throughput.

Description

BEoL Layer Transfer, fully automated (IZM-135) 1x BEoL Layer Transfer, fully automated Um der starken Nachfrage nach einer zuverlässigen Verarbeitung und Handhabung von Halbleiterwafern mit einer Dicke von weniger als 20 µm gerecht zu werden, ist die temporäre Verklebung von Bauelementwafern auf dicken Trägerwafern ein bewährtes Verfahren. Gängige temporäre Trägersysteme sind Glaswafer in Kombination mit polymerbasierten Haftschichten. Bei Glas-Trägern können die temporären Verbindungsschichten für die endgültige Wafer-Entbindung mittels UV-Laser manipuliert werden, um die Haftfestigkeit zu verringern. Das Ziel der hier spezifizierten Maschine ist es, die Entbindung mittels eines auf Infrarotlicht (IR) basierenden Lasers durchzuführen, sodass Siliziumwafer als temporäre Träger verwendet werden können. Der Zweck dieser Gerätespezifikation besteht darin, die grundlegenden Anforderungen an einen vollautomatischen IR-Laser-Debonder für das Ablösen unter anderem folgender Materialien zu definieren • Siliziumwafer und Wafer aus anderen Materialien • Gerätewafer mit einer Dicke von weniger als 20 µm • anorganische RDL-First- und Back-End-of-Line-Schichten (BEoL) vorübergehend auf verschiedenen Arten von Si-Trägerwafern unter Verwendung unterschiedlicher Verbindungsschichten verbunden und montiert. Die vorübergehend verbundenen Waferpaare werden auf Filmrahmen montiert, sodass sie in standardisierten Filmrahmenkassetten zum Laser-Debonder transportiert werden können. Das Debonding-System muss in der Lage sein, die folgenden Schritte vollautomatisch auszuführen. • Laden des Filmrahmens aus der Filmrahmenkassette • Mechanische Vorausrichtung und Lesen der Wafer-ID • Handhabung des Filmrahmens in der Laser-Entbondierungsstation • Laserbehandlung • Entladen des Filmrahmens mit dem laserbehandelten Wafer in die Filmrahmenkassette Um einen hohen Durchsatz zu erzielen, muss die Maschine in der Lage sein, den Laserprozess an einem Waferpaar und die Vorausrichtung eines anderen Waferpaars auf dem Filmrahmen parallel durchzuführen. Darüber hinaus muss die Software des Systems die Programmierung verschiedener automatischer Aktionsabläufe innerhalb und zwischen den verschiedenen Maschinenstationen und Modulen ermöglichen. Die Programmierung von Rezepturen muss innerhalb eines für Forschung und Entwicklung (F&E) erforderlichen angemessenen Bereichs von Optionen und Parametern möglich sein. Optionale Features: - Ein FOUP-Ladeanschluss für SEMI-konforme 300-mm-FOUPs (LV-Pos. 3.2) - Module und Handhabungsstationen - 300-mm-Trennmodul (LV-Pos. 4.3) - Module und Handling-Stationen - 200-mm-Trennmodul (LV-Pos. 4.4) - Zusätzliche Endeffektoren zum Be- und Entladen der Filmrahmen (LV-Pos. 4.5.2) - Endeffektor für die Handhabung von Trägerwafern (LV-Pos. 4.5.3) - Zusätzlicher flacher Touchscreen (LV-Pos. 5.5) - Erstellen und Bearbeiten von Rezepturen auf einem zweiten Computer (LV-Pos. 5.33) - Visualisierung von Prozessparametern in Diagrammen auf einem zweiten Computer (LV-Pos. 5.34) - Umschalten der Laserquelle in den Leerlaufmodus, wenn kein Prozess läuft (LV-Pos. 7.2)

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 2 days ago

What this market pays

The buyer has too few awards of its own in this sector, so this is the range of the last 208 awards for Electrical machinery in Germany.

Median award
€375,007
Middle half of past awards
€219,860 to €672,900

TED - Tenders Electronic Daily (Publications Office of the EU) publishes no value for this notice, so it has no mark on the scale. The official documents may state one.

Award values as published by the official sources. Use them as a guide, not a rule: scope, lots and duration differ between contracts.

Fraunhofer-Gesellschaft - Einkauf B12

Germany

notices in the register
708
awards
327
awarded in total
€1.3M

Who wins its contracts

Many suppliers
different companies won its awards
229
of the awards went to the three most frequent winners
6%
of its calls state an estimated value
0%

Based on 288 awards with a named winner over the last 3 years. Counted by award, not by value, because lot and framework amounts are not comparable. Concentrated means the three most frequent winners took 65% or more of the awards; many suppliers, under 35% with at least ten different winners.

Competition

tenders per lot on average (open and restricted procedures)
5.1
of those lots received a single tender
22%
of the awards went to companies based in another country
16%

As the official award notices state them, over the last 3 years. Tenders per lot count open and restricted procedures only: in a negotiated procedure or a direct award a single tender is the procedure itself. The country is the one the notice gives for the winner.

Who usually wins this buyer's contracts in this sector

Company Wins Total awarded Last win
EV Group E. Thallner GmbH 3 Jul 2026
EKRA Automatisierungssysteme GmbH 2 Jul 2026
Evatec Europe GmbH 2 May 2026
Veeco GmbH 2 May 2026
Amcoss GmbH 1 Sep 2025

Based on 29 awards with a linked company profile over the last 5 years.

160 open tenders right now

Market context

TED - Tenders Electronic Daily (Publications Office of the EU) publishes no value for this notice, so it cannot be placed among the open notices of its sector. The official documents may state one.

open now in Electrical machinery
3,560
median open notice
€576,050

Who wins in this market

Many suppliers

Germany · Electrical machinery

different companies won awards here
476
of the awards went to the three most frequent winners
5%
buyers awarded contracts here
303

Based on 589 awards with a named winner over the last 3 years. Counted by award, not by value, because lot and framework amounts are not comparable. Concentrated means the three most frequent winners took 65% or more of the awards; many suppliers, under 35% with at least ten different winners.

Competition

tenders per lot on average (open and restricted procedures)
3.3
of those lots received a single tender
34%
of the awards went to companies based in another country
13%
of the tenders came from another country
10%

As the official award notices state them, over the last 3 years. Tenders per lot count open and restricted procedures only: in a negotiated procedure or a direct award a single tender is the procedure itself. The country is the one the notice gives for the winner.

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