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Germany - Machinery for general and special purposes - CMP system for 100/150 mm wafers (IAF-03) - PR1199438-2050-P

Original Deutschland - Maschinen für allgemeine und besondere Zwecke - CMP-System für 100/150-mm-Wafer (IAF-03) - PR1199438-2050-P

Awarded Contract award

Key facts

Winner
Accretech
Buyer
Fraunhofer-Gesellschaft - Einkauf B12
Where
Germany Freiburg
Procedure
Open procedure Anyone may submit a bid, in one step, with no pre-selection. Full entry Above the EU threshold A contract large enough that EU-wide rules apply and it must be published on TED. Full entry
CPV code The EU's common vocabulary for what is being bought: an eight-digit code every notice carries. Full entry
42900000 Miscellaneous general and special-purpose machinery
Original language
German
Source
via TED - Tenders Electronic Daily (Publications Office of the EU), verified 4 weeks ago
Notice number
589930-2026
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  1. Published
  2. Awarded pending

Summary

Machine-generated summary

Fraunhofer-Gesellschaft, Einkauf B12, awarded a contract for one CMP system for chemical mechanical polishing of dielectric layers such as silicon oxide on 100 mm and 150 mm Si and III-V semiconductor wafers, with integrated cleaning and optical endpoint detection. The polishing aims to planarize surfaces and improve surface roughness to enable subsequent wafer fusion bonding of III-V semiconductors with Si wafers. The contract was awarded to Accretech. Options cover separate drainage lines for DI water and chemicals, a SECS/GEM interface, and torque EPD.

Description

CMP-System für 100/150-mm-Wafer (IAF-03) 1 CMP-System zur chemisch-mechanischen Politur dielektrischer Schichten wie Siliziumoxid auf 100-mm- und 150-mm-Si- und III-V-Halbleiterwafern mit integrierter Reinigung und optischer Endpunkterkennung. Ziel des Polierens ist die Planarisierung und Verbesserung der Oberflächenrauheit, um ein anschließendes Wafer-Fusionsbonden von III-V-Halbleitern mit Si-Wafern zu ermöglichen. Option 1: Separate drainage lines for DI water and chemicals Option 2: SECS/GEM interface Option 3: Torque EPD

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 4 weeks ago

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Avg. open tender · Industrial machinery
€1,707,738
2,489 open across Europe right now
Buyer track record on Aperlena
388 notices tracked · 182 awarded
€651,275 in awarded contracts

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