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Germany - Laboratory, optical and precision equipment (except glass) - ALD system

Original Deutschland - Laborgeräte, optische Geräte und Präzisionsgeräte (außer Gläser) - ALD-Anlage

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  1. Published
  2. Deadline open for 34 days
  3. Awarded pending

Summary

Machine-generated summary

The Leibniz Institute for Photonic Technologies is procuring a plasma-enhanced atomic layer deposition system for thin film deposition. The equipment must deposit conductive, semiconducting and dielectric layers on various substrates, ranging from individual chip formats of 5 x 5 mm to at least 150 mm wafers. The system must support multilayer processing without breaking the vacuum. Delivery must include a control PC with monitor, keyboard, mouse, software licenses and the Windows 11 operating system. The buyer is located in Germany. No estimated contract value, submission deadline, eligible bidder criteria or procurement procedure details are specified in the provided information.

Description

Das Leibniz-Institut für Photonische Technologien e.V. schreibt für die Dünnschichtabscheidung eine Plasma-gestützte Atomlagenabscheidungsanlage (kurz: PE-ALD, engl. Plasma enhanced atomic layer deposition) aus, welche zum Abscheiden von Dünnschichten auf unterschiedlichen Substraten vom Einzelchipformat (5 x 5 mm²) bis mindestens 150 mm Wafer eingesetzt werden soll. Die zentralen Anforderungen an das System sind reproduzierbare Abscheideprozesse verschiedener leitfähiger, halbleitender und dielektrischer Schichten. Diese sollen auch ohne Vakuumunterbrechung (Multilagen) prozessiert werden. Ein Steuer-PC mit Monitor, Tastatur, Maus, entsprechender Software-Lizenzen und aktuellem Betriebssystem (Win 11) ist mitzuliefern.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

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  1. Act now
    • Estimated value: Set to €461,344
    • Submission deadline: Moved 1 day EARLIER: now August 11, 2026, 00:00
    • Estimated value: Set to €461,344

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Market context

Avg. open tender · Laboratory & precision equipment
€5,603,992
2,330 open across Europe right now 92% below sector average
Buyer track record on Aperlena
9 notices tracked · 3 awarded
€958,204 in awarded contracts

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