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Germany - Laboratory, optical and precision equipment (excluding glass) - ALD system

Original Deutschland - Laborgeräte, optische Geräte und Präzisionsgeräte (außer Gläser) - ALD-Anlage

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Summary

Machine-generated summary

The Leibniz Institute of Photonic Technology (Leibniz-Institut für Photonische Technologien e.V.) awarded a contract for a plasma-enhanced atomic layer deposition system (PE-ALD) for thin-film deposition. The system must deposit thin films on substrates from single chip format (5 x 5 mm²) up to at least 150 mm wafers and must support reproducible deposition of conductive, semiconducting and dielectric layers, including multilayers without vacuum break. A control PC with monitor, keyboard, mouse, software licences and Windows 11 is included. The contract was won by SENTECH Gesellschaft für Sensortechnik mbH for EUR 461,344, matching the estimated value within 1%. The award date was 2026-09-07.

Description

Das Leibniz-Institut für Photonische Technologien e.V. schreibt für die Dünnschichtabscheidung eine Plasma-gestützte Atomlagenabscheidungsanlage (kurz: PE-ALD, engl. Plasma enhanced atomic layer deposition) aus, welche zum Abscheiden von Dünnschichten auf unterschiedlichen Substraten vom Einzelchipformat (5 x 5 mm²) bis mindestens 150 mm Wafer eingesetzt werden soll. Die zentralen Anforderungen an das System sind reproduzierbare Abscheideprozesse verschiedener leitfähiger, halbleitender und dielektrischer Schichten. Diese sollen auch ohne Vakuumunterbrechung (Multilagen) prozessiert werden. Ein Steuer-PC mit Monitor, Tastatur, Maus, entsprechender Software-Lizenzen und aktuellem Betriebssystem (Win 11) ist mitzuliefern.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 2 hours ago

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Market context

Avg. open tender · Laboratory & precision equipment
€5,582,211
2,329 open across Europe right now 92% below sector average
Buyer track record on Aperlena
9 notices tracked · 3 awarded
€958,204 in awarded contracts

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