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Germany - Laboratory, optical and precision instruments (excl. glasses) - ALD system

Original Deutschland - Laborgeräte, optische Geräte und Präzisionsgeräte (außer Gläser) - ALD-Anlage

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  1. Published
  2. Deadline open for 7 days
  3. Awarded pending

Summary

Machine-generated summary

The Leibniz-Institut für Photonische Technologien e.V. published a contract notice for the procurement of a plasma-enhanced atomic layer deposition system (PE-ALD) for thin-film deposition. The system is intended to deposit thin layers on different substrates, from single chip format (5 x 5 mm²) up to at least 150 mm wafers. Key requirements include reproducible deposition processes for various conductive, semiconducting and dielectric layers, which must also be processed without vacuum interruption (multilayers). A control PC with monitor, keyboard, mouse, suitable software licences and a current operating system (Win 11) must be supplied. The estimated value is EUR 461,344. Bidding has closed; the deadline for bids was 2026-09-01.

Description

Das Leibniz-Institut für Photonische Technologien e.V. schreibt für die Dünnschichtabscheidung eine Plasma-gestützte Atomlagenabscheidungsanlage (kurz: PE-ALD, engl. Plasma enhanced atomic layer deposition) aus, welche zum Abscheiden von Dünnschichten auf unterschiedlichen Substraten vom Einzelchipformat (5 x 5 mm²) bis mindestens 150 mm Wafer eingesetzt werden soll. Die zentralen Anforderungen an das System sind reproduzierbare Abscheideprozesse verschiedener leitfähiger, halbleitender und dielektrischer Schichten. Diese sollen auch ohne Vakuumunterbrechung (Multilagen) prozessiert werden. Ein Steuer-PC mit Monitor, Tastatur, Maus, entsprechender Software-Lizenzen und aktuellem Betriebssystem (Win 11) ist mitzuliefern.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 3 weeks ago

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Market context

Avg. open tender · Laboratory & precision equipment
€5,502,828
2,004 open across Europe right now 92% below sector average
Buyer track record on Aperlena
9 notices tracked · 3 awarded
€958,204 in awarded contracts

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