Summary
Machine-generated summaryFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e. V. awarded a contract for an upgrade of the existing process monitoring system mesc21-11, a Nanofocus topography measurement system with serial number 700259, located at Fraunhofer IPMS CNT, An der Bartlake 5. The upgrade consists of an automatic handling system for wafers in a separately enclosed environment. The system handles wafers from a SEMI 300 mm FOUP to the existing measurement tool and can introduce 200 mm wafers into a suitable adapter, enabling processing on standard 300 mm tools, and handle the 200 mm wafers in the adapter into a SEMI standard 300 mm FOUP. The contract has been awarded.
Description
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Source: TED - Tenders Electronic Daily (Publications Office of the EU)
Always verify details on the official notice.
Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 3 weeks ago
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