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Germany - Various machines and equipment for special purposes - Process Monitoring Tool

Original Deutschland - Diverse Maschinen und Geräte für besondere Zwecke - Process Monitoring Tool

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  1. Published
  2. Awarded pending

Summary

Machine-generated summary

Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e. V. awarded a contract for an upgrade of the existing process monitoring system mesc21-11, a Nanofocus topography measurement system with serial number 700259, located at Fraunhofer IPMS CNT, An der Bartlake 5. The upgrade consists of an automatic handling system for wafers in a separately enclosed environment. The system handles wafers from a SEMI 300 mm FOUP to the existing measurement tool and can introduce 200 mm wafers into a suitable adapter, enabling processing on standard 300 mm tools, and handle the 200 mm wafers in the adapter into a SEMI standard 300 mm FOUP. The contract has been awarded.

Description

Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to introduce 200 mm Wafers into a suitable adapter enabling processing on standard 300 mm tools and handle the 200 mm wafers in adapter into a SEMI standard 300 mm FOUP.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 3 weeks ago

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Avg. open tender · Industrial machinery
€1,949,054
2,388 open across Europe right now
Buyer track record on Aperlena
34 notices tracked · 15 awarded
€295,141 in awarded contracts

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