Description
The tender item is an ion beam etching process tool to be used for 300mm wafer fabrication at the FRAUNHOFER IPMS. The systems will be used for the processing of CMOS wafers in a cleanroom class 1000 (approximately class 6 EN ISO 14644-1) production environment. Therefore, it is necessary to fulfill require-ments regarding metal contamination and particle generation compatible with industry standards.
Official source
Source: TED - Tenders Electronic Daily (Publications Office of the EU)
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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago
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Market context
- Avg. open tender · Industrial machinery
- €1,704,260
- Buyer track record on Aperlena
- 35 notices tracked · 15 awarded
- €295,141 in awarded contracts
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