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France - Electronic, electromechanical and electrotechnical supplies - Thin film measurement tool compatible with 200 mm and 300 mm wafers

Original France - Fournitures électroniques, électromécaniques et électrotechniques - Fourniture d’un outil de mesure de couches minces compatible avec wafers de 200 mm et 300 mm

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Key facts

Buyer
CEA/GRENOBLE
Where
France Rhône-Alpes
Procedure
Negotiated procedure The buyer selects candidates, then negotiates the offers before choosing. Full entry Above the EU threshold A contract large enough that EU-wide rules apply and it must be published on TED. Full entry
CPV code The EU's common vocabulary for what is being bought: an eight-digit code every notice carries. Full entry
31700000 Electronic, electromechanical and electrotechnical supplies 31712100 Microelectronic machinery and apparatus
Original language
French
Published
Source
via TED - Tenders Electronic Daily (Publications Office of the EU), verified 1 month ago
Notice number
368559-2026
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Summary

Machine-generated summary

The CEA-LETI research institute in Grenoble, France, is procuring a thin film measurement tool compatible with 200 mm and 300 mm wafers, for use in a class 100 cleanroom. The equipment must combine spectroscopic ellipsometry and reflectometry functions and deliver precise, repeatable measurements of thickness and optical properties of single or stacked layers, supporting FD-SOI 10 nm technology research and beyond, including SOI, high-k materials, GaN, SiC and III-V technologies. The contract includes a firm tranche for the base equipment and an optional tranche for an OCD module with computing environment, plus optional items such as training, transformer, coolers and warranty extension.

Description

Pour ses activités de recherche visant au développement des technologies FD-SOI 10 nm et au-delà, le CEA-LETI souhaite acquérir un outil de mesure de couches minces compatible wafers 200 mm et 300 mm, utilisable en salle blanche classe 100. L’équipement devra intégrer des fonctions d’ellipsométrie et de réflectométrie spectroscopiques. Il devra assurer des mesures précises et reproductibles des épaisseurs et propriétés optiques de couches simples ou empilées. Les technologies ciblées incluent notamment SOI, matériaux high-k, GaN, SiC et III-V par exemple. Le marché envisagé comprend : - une tranche ferme correspondant à l’équipement de base, - une tranche optionnelle n°1 relative à la fourniture de OCD et l’environnement informatique (Module OCD). Le présent marché comporte les options à chiffrage facultatif suivantes : o OPT1 : Formation à la Maintenance 1er niveau o OPT2 : Formation à la Maintenance avancée o OPT3 : Fourniture d’un transformateur électrique o OPT4 : Fourniture d’un échangeur de chaleur / refroidisseurs o OPT5 : Extension de garantie d’une durée d’un an supplémentaire o OPT6 : Le prix du transport, assurance comprise, selon les conditions DAP CEA Grenoble (Convention Incoterms ICC 2020).

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

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Market context

Avg. open tender · Electrical machinery
€52,895,083
3,049 open across Europe right now
Buyer track record on Aperlena
7 notices tracked · 2 awarded
€2 in awarded contracts

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