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Finland - Laboratory, optical and precision equipments (excl. glasses) - Edge-Handling Sputtering Cluster Tool

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  1. Published
  2. Deadline open for 18 days
  3. Awarded pending

Summary

Machine-generated summary

The buyer, VTT Micronova, is procuring an edge-handling sputtering cluster tool for its semiconductor front end cleanroom in Finland. The equipment is designed for 200-mm wafers and includes a deposition chamber with four magnetron sputtering sources. A key feature is that wafers are mechanically touched only at the edge during transport and processing, and they can be flipped in a vacuum between processes. The technical requirements are detailed in the invitation to tender documents. The estimated value, submission deadline, eligible bidders, and procedure type are not specified in the provided text.

Description

The object of the tender process is an edge-handling sputtering cluster tool (later also “Equipment”). The Equipment is a sputtering cluster tool for 200-mm wafers with wafer edge-handling capability for the VTT Micronova cleanroom semiconductor front end. The procurement includes a deposition chamber with four magnetron sputtering sources. During transport and processing, the wafers are mechanically touched only at the wafer edge, and they can be flipped in vacuum between the processes. The object of the tender process and the technical requirements are described in more detail in the invitation to tender documents.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

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Market context

Avg. open tender · Laboratory & precision equipment
€5,654,778
2,297 open across Europe right now
Buyer track record on Aperlena
24 notices tracked · 8 awarded
€4,640,034 in awarded contracts

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