Summary
Machine-generated summaryThe Technical University of Munich, Chair of Technical Physics E23/WMI, is procuring a UHV cluster system for fabricating superconducting circuits on 8 inch wafers. The system must provide UHV conditions and include an HV load-lock chamber, a central handling chamber, chambers for Al thin film evaporation, sputtering of superconductors, oxidation, Ar ion milling, and a flipping station. It must allow in situ metallizing of both wafer sides with minimal backside particle contamination, gripping wafers only at the edge. Further details, estimated value, deadline and bidding conditions are given in the specification documents. Procedure type is stated in the documents.
Description
Official source
Source: TED - Tenders Electronic Daily (Publications Office of the EU)
Always verify details on the official notice.
Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 3 weeks ago
More from this buyer
Full buyer profileThis buyer has no award history in this sector yet. Usual winners, Laboratory & precision equipment - Germany
| Company | Wins | Total awarded | Last win |
|---|---|---|---|
| Thermo Fisher Scientific GmbH | 38 | €8.7M | Sep 2026 |
| Carl Zeiss Microscopy Deutschland GmbH | 22 | €5.7M | Sep 2026 |
| KEYENCE Deutschland GmbH | 22 | €769,435 | Sep 2026 |
| Agilent Technologies Deutschland GmbH | 14 | €2.0M | Sep 2026 |
| Bruker Daltonics GmbH & Co. KG | 10 | €3.6M | Sep 2026 |
Based on 895 awards with a linked company profile over the last 2 years.
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Market context
- Avg. open tender · Laboratory & precision equipment
- €5,449,592
- Buyer track record on Aperlena
- 1 notices tracked · 0 awarded
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