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Germany - Laboratory, optical and precision equipment (excluding glass) - Deep silicon etching system (DRIE) for MEMS

Original Deutschland - Laborgeräte, optische Geräte und Präzisionsgeräte (außer Gläser) - Ätzanlage zum tiefen Silicium-Ätzen für MEMS

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Key facts

Estimated value
€1,024,000
Buyer
Ruhr-Universität Bochum
Where
Germany Arnsberg
Procedure
Competitive dialogue A procedure for complex projects where the solution itself is worked out with the candidates. Full entry Above the EU threshold A contract large enough that EU-wide rules apply and it must be published on TED. Full entry
CPV code The EU's common vocabulary for what is being bought: an eight-digit code every notice carries. Full entry
38000000 Laboratory, optical and precision equipments (excl. glasses)
Original language
German
Published
Source
via TED - Tenders Electronic Daily (Publications Office of the EU), verified 1 month ago
Notice number
562332-2026
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Summary

Machine-generated summary

Ruhr University Bochum intends to procure a DRIE etching system for its Microelectronics Research Laboratory in Bochum, Germany. The system will be used for wafer substrates up to 200 mm diameter, mainly for deep anisotropic silicon etching in silicon-based micro-electro-mechanical systems (MEMS) using a cyclic etching process known as the Bosch process. It will also serve research into new etching concepts that use less climate-damaging etching gases.

Description

Die Ruhr-Universität Bochum beabsichtigt eine DRIE Ätzanlage zu beschaffen, die im Forschungslabor Mikroelektronik Bochum für Wafer-Substrate bis 200 mm Durchmesser eingesetzt werden soll. Sie soll auf dem Gebiet der Silicium-basierten Mikro-Elektro-Mechanischen Systeme (MEMS) für das tiefe anisotrope Siliciumätzen auf Basis eines zyklischen Ätzprozesses (DRIE, "BOSCH-Prozess") eingesetzt werden und darüber hinaus der Erforschung neuer Ätzkonzepte dienen, die weniger klimaschädliche Ätzgase nutzen.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

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More from this buyer

Full buyer profile

11 open tenders right now

This buyer has no award history in this sector yet. Usual winners, Laboratory & precision equipment - Germany

Company Wins Total awarded Last win
Thermo Fisher Scientific GmbH 38 €8.7M Sep 2026
Carl Zeiss Microscopy Deutschland GmbH 22 €5.7M Sep 2026
KEYENCE Deutschland GmbH 22 €769,435 Sep 2026
Agilent Technologies Deutschland GmbH 15 €2.1M Sep 2026
Bruker Daltonics GmbH & Co. KG 10 €3.6M Sep 2026

Based on 909 awards with a linked company profile over the last 2 years.

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Market context

Avg. open tender · Laboratory & precision equipment
€5,550,179
2,006 open across Europe right now 82% below sector average
Buyer track record on Aperlena
97 notices tracked · 67 awarded
€4,796,924 in awarded contracts

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