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Finland - Laboratory, optical and precision equipments (excl. glasses) - Wafer metrology

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  2. Awarded pending

Summary

Machine-generated summary

VTT Technical Research Centre of Finland Ltd procured a semi-automatic wafer metrology tool for measuring total thickness, total thickness variation, warp, bow, metallization bumps, trench or via depth and geometric factors in substrates such as silicon wafers, chips, stacked wafers, stacked chips, samples containing mixed oxides and thin deposited materials. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The contract was awarded to FRT GmbH for EUR 464,674.

Description

The object of the tender was semi-automatic wafer metrology tool (later also “tool”) for measurement of total thickness, TTV (total thickness variation), warp, bow, metallization bumps, trench or via depth and geometric factors in substrates typical in semiconductor industry such as but not limited to silicon wafers, chips, stacked wafers, stacked chips, samples containing mixed oxides, or/and thin materials deposited. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process was described in more detail in the invitation to tender documents.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 2 weeks ago

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Market context

Avg. open tender · Laboratory & precision equipment
€5,443,417
2,058 open across Europe right now
Buyer track record on Aperlena
25 notices tracked · 8 awarded
€4,640,034 in awarded contracts

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