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TED - Tenders Electronic Daily (Publications Office of the EU) verified 1 week ago Contract notice

Germany - Various machinery and equipment for special purposes - Upgrade of a 200 mm WxZ Tungsten CVD Chamber to WxZ Sprint Configuration

Original Deutschland - Diverse Maschinen und Geräte für besondere Zwecke - Upgrade of a 200 mm WxZ Tungsten CVD Chamber to WxZ Sprint Configuration

Closed Germany Brandenburg Industrial machinery

Buyer IHP GmbH - Leibniz-Institut für innovative Mikroelektronik

Key facts

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  1. Published
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Summary

Machine-generated summary

The procurement covers the upgrade of an existing 200 mm tungsten chemical vapor deposition (CVD) system from manufacturer Applied Materials Inc. (AMAT) to a WxZ Sprint configuration. This includes modifying the gas distribution system to enable pulsed tungsten deposition, switching gases WF6 and SiH4 between the exhaust line and process chamber for high aspect ratio gap-fill applications, and integrating additional hardware allowing deposition pressures up to 300 Torr. The scope covers planning, delivery, integration, commissioning, testing and qualification of hardware and software. A site visit of the installation is recommended.

Description

Gegenstand der Beschaffung ist das Upgrade eines bestehenden 200 mm Wolfram Chemical Vapor Deposition (CVD)-Systems des Herstellers Applied Materials Inc. (AMAT) auf eine WxZ Sprint Konfiguration. Hierzu sind insbesondere Anpassungen am Gasverteilungssystem zur Realisierung eines gepulsten Wolfram-Abscheidungsprozesses sowie die Integration zusätzlicher Hardware zur Ermöglichung von Depositionsdrücken bis 300 Torr erforderlich. Die Leistungen umfassen die Planung, Lieferung, Integration, Inbetriebnahme und Qualifizierung der erforderlichen Hard- und Softwareanpassungen am bestehenden Anlagensystem. Gegenstand der Beschaffung ist das Upgrade eines bestehenden 200 mm Wolfram-CVD-Systems des Herstellers Applied Materials Inc. (AMAT) auf eine WxZ Sprint Konfiguration. Hierfür sind die Lieferung, Integration und Inbetriebnahme der erforderlichen Hard- und Softwarekomponenten sowie die Durchführung aller notwendigen Anpassungs-, Test- und Qualifizierungsmaßnahmen erforderlich. Der Leistungsumfang umfasst insbesondere die Modifikation des Gasverteilungssystems zur Realisierung eines kontrollierten Umschaltens der Prozessgase WF6 und SiH4 zwischen Abgasleitung und Prozesskammer zur Unterstützung eines gepulsten Wolfram-Abscheidungsprozesses für High Aspect Ratio Gap-Fill Anwendungen. Darüber hinaus ist zusätzliche Hardware zur Ermöglichung von Depositionsdrücken bis 300 Torr zu liefern und in das bestehende System zu integrieren. Die angebotene Lösung muss mit der vorhandenen Anlagenkonfiguration kompatibel sein und die technische Funktionalität einer WxZ Sprint Konfiguration gewährleisten. Zur Ermittlung des konkreten Anpassungsbedarfs wird eine Vor-Ort-Besichtigung der Anlage empfohlen.

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Source: TED - Tenders Electronic Daily (Publications Office of the EU)

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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 week ago

IHP GmbH - Leibniz-Institut für innovative Mikroelektronik

Germany

notices in the register
48
awards
16
awarded in total
€1.5M

Who wins its contracts

Moderately concentrated
different companies won its awards
13
of the awards went to the three most frequent winners
38%
of its calls state an estimated value
0%

Based on 16 awards with a named winner over the last 3 years. Counted by award, not by value, because lot and framework amounts are not comparable. Concentrated means the three most frequent winners took 65% or more of the awards; many suppliers, under 35% with at least ten different winners.

Competition

tenders per lot on average (open and restricted procedures)
1.4
of those lots received a single tender
67%
of the awards went to companies based in another country
13%

As the official award notices state them, over the last 3 years. Tenders per lot count open and restricted procedures only: in a negotiated procedure or a direct award a single tender is the procedure itself. The country is the one the notice gives for the winner.

Awards most often to

  1. Keysight Technologies Deutschland GmbH 2 awards €1.3M
  2. ATV Systems GmbH 2 awards €189,900
  3. ASM Europe B.V. 2 awards

3 open tenders right now

Market context

open now in Industrial machinery
1,914
median open notice
€155,000

Who wins in this market

Many suppliers

Germany · Industrial machinery

different companies won awards here
574
of the awards went to the three most frequent winners
4%
buyers awarded contracts here
303

Based on 714 awards with a named winner over the last 3 years. Counted by award, not by value, because lot and framework amounts are not comparable. Concentrated means the three most frequent winners took 65% or more of the awards; many suppliers, under 35% with at least ten different winners.

Competition

tenders per lot on average (open and restricted procedures)
2.3
of those lots received a single tender
41%
of the awards went to companies based in another country
16%
of the tenders came from another country
16%

As the official award notices state them, over the last 3 years. Tenders per lot count open and restricted procedures only: in a negotiated procedure or a direct award a single tender is the procedure itself. The country is the one the notice gives for the winner.

Change history

Every time an official source republished this notice with different content. We watch every source we index, including regional copies of the same notice.

  1. Scope and criteria
    The description was expanded. Re-read it before you bid.

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