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Germany - Various machines and equipment for special purposes - System for High Aspect Ratio Etch consisting of mainframe and process chambers (IPMS-CNT05.1) - PR1153448-2480-P

Original Deutschland - Diverse Maschinen und Geräte für besondere Zwecke - System for High Apect Ratio Etch consisting of mainframe and process chambers (IPMS-CNT05.1) - PR1153448-2480-P

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Open race

No supplier dominates: 26 different companies have won the last 35 comparable contracts from this buyer over 5 years. This is a genuinely open race.

Based on 35 comparable awards by this buyer in this sector over 5 years. Every verdict is recorded before the outcome and graded against the award notice. How we score ourselves.

Summary

Machine-generated summary

The buyer is procuring one fully automated process tool for plasma etching on 300 mm wafers, consisting of a mainframe and process chambers, for use on silicon CMOS wafers in a cleanroom class 1000 (approximately class 6 per EN ISO 14644-1) production environment. The system is intended for structuring high aspect ratio features in silicon and associated materials such as SiO2 and SiN. Optional items are included per the technical tender specification.

Description

1 Stück System for High Apect Ratio Etch consisting of mainframe and process chambers (IPMS-CNT05.1) Die Spezifikation beschreibt die Anforderungen an ein vollautomatisches Prozessgerät, das für Plasmaätzprozesse auf Wafern mit einem Durchmesser von 300 mm eingesetzt werden soll. Die Systeme werden für die Bearbeitung von Silizium-CMOS-Wafern in einer Produktionsumgebung der Reinraumklasse 1000 (entspricht in etwa Klasse 6 nach EN ISO 14644-1) eingesetzt. Das neue Werkzeug soll zur Strukturierung von Strukturen mit hohem Aspektverhältnis in Silizium sowie in allen damit verbundenen erforderlichen Materialien (z. B. SiO₂, SiN) eingesetzt werden, um dieses Hauptziel zu erreichen. Optionale Positionen gemäß Technical Tender Specification.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

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More from this buyer

Full buyer profile

87 open tenders right now

Who usually wins this buyer's contracts in this sector

Company Wins Total awarded Last win
EV Group E. Thallner GmbH 4 n/a Aug 2026
Applied Materials South East Asia Pte. Ltd. 3 n/a Apr 2026
KLA Corporation 3 n/a Aug 2026
AP und S International GmbH 2 n/a Sep 2026
SENTECH Gesellschaft für Sensortechnik mbH 2 n/a May 2026

Based on 35 awards with a linked company profile over the last 5 years.

Change history

Every time an official source republished this notice with different content. We watch every source we index, including regional copies of the same notice.

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    • Scope and criteria: The description was expanded. Re-read it before you bid.

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Market context

Avg. open tender · Industrial machinery
€1,925,783
2,374 open across Europe right now
Buyer track record on Aperlena
385 notices tracked · 181 awarded
€651,275 in awarded contracts

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