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Deutschland - Diverse Maschinen und Geräte für besondere Zwecke - Chlor ICP mit ALE Erweiterung (IAF-07a.1 - PR1011457-2050-P

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Key facts

Winner
SENTECH Gesellschaft für Sensortechnik mbH
Buyer
Fraunhofer-Gesellschaft - Einkauf B12
Where
Germany Freiburg
Procedure
Negotiated procedure The buyer selects candidates, then negotiates the offers before choosing. Full entry Above the EU threshold A contract large enough that EU-wide rules apply and it must be published on TED. Full entry
CPV code The EU's common vocabulary for what is being bought: an eight-digit code every notice carries. Full entry
42990000 Miscellaneous special-purpose machinery
Original language
German
Source
via TED - Tenders Electronic Daily (Publications Office of the EU), verified 1 month ago
Notice number
70256-2026
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Description

Chlor ICP mit ALE Erweiterung (IAF-07a.1) 1 Stück Chlor ICP mit ALE Erweiterung Chlor ICP Ätzanlage mit planarer Quelle und Erweiterung für Atomlagenätzen (ALE / Atomic Layer Etching) inkl. Endpunktdetektion Option 1: Möglichkeit Wafer mit 100mm-Durchmesser, sowie Bruchstücke auf Metall-Carriern zu Ätzen. Option 2: Möglichkeit Wafer mit 75mm-Durchmesser, sowie Bruchstücke auf Metall-Carriern zu Ätzen. Option 3: SESC/GEM Schnittstellen-Erweiterung für Datentransfer vom MES an die Anlage Option 4: Einweisung der IAF Anlagenoperatoren in ALE Prozesse Option 5: Substratelektrode/Bias: HF-Generator (Austauschgenerator) Option 6: Beheizter Liner für Reaktor (für Austausch) Option 7: Koppelplatte Al2O3 ohne Fenster Option 8: Klemmring für 150 mm Wafer Option 9: magnetisch gelagerte Trockenpumpe (für Austausch), wie in 8.1

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

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Market context

Avg. open tender · Industrial machinery
€1,784,570
2,375 open across Europe right now
Buyer track record on Aperlena
385 notices tracked · 181 awarded
€651,275 in awarded contracts

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