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Germany - Various machines, equipment and accessories - Cure Anneal (IZM-139) - PR1233787-3460-P

Original Deutschland - Diverse Maschinen, Einrichtungen und Zubehör - Cure Anneal (IZM-139) - PR1233787-3460-P

Awarded Contract award

Key facts

Where
Germany Dresden
Procedure
Negotiated procedure The buyer selects candidates, then negotiates the offers before choosing. Full entry Above the EU threshold A contract large enough that EU-wide rules apply and it must be published on TED. Full entry
CPV code The EU's common vocabulary for what is being bought: an eight-digit code every notice carries. Full entry
30190000 Various office equipment and supplies
Original language
German
Source
via TED - Tenders Electronic Daily (Publications Office of the EU), verified 3 weeks ago
Notice number
599333-2026
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  1. Published
  2. Awarded pending

Summary

Machine-generated summary

Fraunhofer-Gesellschaft, purchasing department B12, awarded a contract for one Cure Anneal system (IZM-139). This is an annealing or curing oven with controlled temperature ramps, a highly stable temperature process and a defined gas atmosphere for substrates such as silicon and glass wafers of 300 mm and 200 mm. The machine must fully automatically unload wafers from FOUPs, run defined process steps in a temperature, pressure and gas controlled area, and reload the wafers, using two load ports for high throughput. Recipe programming for research and development is required. The contract was awarded to Crystec Technology Trading GmbH.

Description

1x Cure Anneal (IZM-139) Der Zweck dieser Gerätespezifikation besteht darin, grundlegende Anforderungen an einen Aushärtungs-/Temperofen mit regelbaren Temperaturanstiegen, einem hochstabilen Temperaturprozess und einer definierten Gasatmosphäre für verschiedene Substrattypen und -größen (Si, Glas mit Wafergrößen von 300 mm und 200 mm) festzulegen. Vor dem Aushärtungs-/Temperprozess werden die Wafer in Front Opening Unified Pods (FOUPs) an das Gerät geliefert, die vom Bediener auf die jeweiligen Ladeöffnungen gesetzt werden. Das Gerät muss in der Lage sein, die folgende Abfolge von Schritten vollautomatisch auszuführen: • automatisches Entladen der Wafer aus den FOUPs • Definierte Prozessschritte in einem temperatur-, druck- und gasgeregelten Bereich • Rückladen der Wafer in die Ausgangsposition in den FOUP Um einen hohen Durchsatz zu gewährleisten, muss die Maschine mit zwei Ladeöffnungen ausgestattet sein. Die Programmierung von Rezepturen muss innerhalb eines angemessenen Bereichs von Optionen und Parametern möglich sein, wie es für Forschung und Entwicklung (F&E) erforderlich ist.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 3 weeks ago

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Avg. open tender · Office & computing machinery
€11,703,054
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Buyer track record on Aperlena
385 notices tracked · 181 awarded
€651,275 in awarded contracts

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