Summary
Machine-generated summaryFraunhofer-Gesellschaft, purchasing department B12, awarded a contract for one Cure Anneal system (IZM-139). This is an annealing or curing oven with controlled temperature ramps, a highly stable temperature process and a defined gas atmosphere for substrates such as silicon and glass wafers of 300 mm and 200 mm. The machine must fully automatically unload wafers from FOUPs, run defined process steps in a temperature, pressure and gas controlled area, and reload the wafers, using two load ports for high throughput. Recipe programming for research and development is required. The contract was awarded to Crystec Technology Trading GmbH.
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Source: TED - Tenders Electronic Daily (Publications Office of the EU)
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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 3 weeks ago
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