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Ireland - Supply of a Suite of Plasma Etcher and Plasma Deposition Tools, 4 Lots (LA3215C-UCC-CFT)

Original Ireland - Laboratory, optical and precision equipments (excl. glasses) - LA3215C-UCC-CFT for the Supply of a Suite of Plasma Etcher and Plasma Deposition Tools, 4 Lots

Closed Contract notice

Key facts

Closed
Estimated value
€3,300,000
Buyer
Education Procurement Service (EPS)
Where
Ireland Southern
Procedure
Open procedure Anyone may submit a bid, in one step, with no pre-selection. Full entry Above the EU threshold A contract large enough that EU-wide rules apply and it must be published on TED. Full entry
CPV code The EU's common vocabulary for what is being bought: an eight-digit code every notice carries. Full entry
38000000 Laboratory, optical and precision equipments (excl. glasses)
Original language
English
Source
via TED - Tenders Electronic Daily (Publications Office of the EU), verified 1 month ago
Notice number
415187-2026
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  1. Published
  2. Deadline open for 30 days
  3. Awarded pending

Summary

Machine-generated summary

University College Cork seeks tenders for the supply, delivery, installation, and commissioning of a suite of plasma etching and deposition tools for the Tyndall National Institute. The tender is divided into four lots: silicon dielectric plasma etcher, metals and piezoelectrics plasma etcher, slow atomic layer etcher, and PECVD plasma deposition system. The equipment will support the fabrication of semiconductor devices, including silicon microelectronics and MEMS, processing 100 mm and 200 mm wafers. Cutting-edge suppliers capable of meeting high precision and reliability standards are encouraged to submit proposals.

Description

Tenders are sought for the supply delivery, installation and commissioning of a suite of tools in 4 Lots for silicon-based and dielectric materials for University College Cork. The new plasma tools will enhance the capabilities at the Tyndall National Institute for the fabrication of semiconductor devices, especially silicon microelectronics and silicon MEMS, but also other materials such as germanium and silicon carbide. We invite proposals for the following lots; Lot 1 Plasma Etcher Silicon Dielectrics, advanced plasma etching system capable of etching for polysilicon poly-Si silicon dioxide SiO2 silicon nitride SiN thin films using medium high-density plasma processes. Lot 2 Plasma Etcher Metals Piezoelectrics, advanced plasma etching system capable of etching for aluminium Al and alloys molybdenum Mo aluminium scandium nitride AlScN thin films using medium high-density plasma processes. Lot 3 Plasma Etcher Slow and Controllable Rate Atomic Layer Etch for Silicon Dielectrics, advanced plasma etching system capable of both conventional high-rate etching and slow and controllable rate atomic layer etching for silicon Si silicon dioxide SiO2 silicon nitride SiN thin films using medium high-density plasma processes. Lot 4 Plasma Deposition PECVD, advanced plasma enhanced chemical vapour deposition system capable of depositing dielectric SiO2, SiN and amorphous a-Si thin films on semiconductor substrates. This equipment will be essential for etching and depositing a range of materials used in the fabrication of silicon microelectronics, silicon photonics and silicon MEMS devices. The ideal tools will offer precision, reliability, and efficiency to meet the requirements for etching and deposition on both 100 mm and 200 mm diameter wafers. Tenderers with cutting-edge solutions that can achieve these high standards are encouraged to submit their proposals for this vital component in our technological advancement.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

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  1. Act now
    • Status: Now marked as Closed
    • Estimated value: Set to €3,300,000
    • Submission deadline: Brought forward by 1 day: now July 17, 2026, 00:00
    • Estimated value: Set to €3,300,000

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Market context

Avg. open tender · Laboratory & precision equipment
€5,445,684
2,014 open across Europe right now 39% below sector average
Buyer track record on Aperlena
969 notices tracked · 746 awarded
€61,637,209 in awarded contracts

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