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France - Microelectronic machines and apparatus - Acquisition and commissioning of an ALD equipment for advanced metal and metal nitride films for CEA Grenoble - ALD Tool for advanced metal and metal nitrides

Original France - Machines et appareils microélectroniques - Acquisition et mise en service d’un équipement ALD pour les films avancés métalliques et nitrures métalliques pour le CEA de GRENOBLE - ALD Tool for advanced metal and metal nitrides

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Open race

No supplier dominates: 10 different companies have won the last 10 comparable contracts from this buyer over 5 years. This is a genuinely open race.

Based on 10 comparable awards by this buyer in this sector over 5 years. Every verdict is recorded before the outcome and graded against the award notice. How we score ourselves.

Summary

Machine-generated summary

CEA-LETI, as part of the CEA in Grenoble, France, intends to acquire and commission a fully automatic Atomic Layer Deposition (ALD) tool. The equipment must mainly process 300 mm wafers (or 200 mm wafers using 200-300 mm carriers) and is intended for depositing metals and metal nitrides for non-volatile memories and advanced contacts, supporting research on fully depleted SOI technologies of 10 nm and beyond. It must also include a cleaning solution to improve surface quality before deposition. The contract includes mandatory Option 1 (Level 1 maintenance training) and optional items such as advanced training, chillers, transformer, maintenance services, extended warranty and DAP delivery to CEA Grenoble.

Description

Dans le cadre de ses activités de recherche visant à développer des technologies SOI à épuisement total de 10 nm et au-delà, le CEA-LETI souhaite acquérir un équipement de dépôt par couche atomique (ALD) entièrement automatique. Cet équipement devra principalement traiter des plaquettes de 300 mm (ou de 200 mm à l’aide de supports 200-300 mm). Il est destiné au dépôt de métaux ainsi que de nitrures métalliques pour les mémoires non volatiles et les contacts avancés. Cet équipement devra également inclure une solution de nettoyage afin d’améliorer la qualité de surface avant le dépôt de métaux et de nitrures métalliques. Le marché comprend également l’option à chiffrage obligatoire suivante* : - Option 1 - Formation de maintenance Niveau 1 (Chapitre 9) Le marché comprend également les options à chiffrage facultatif suivantes* : - Option 2 - Échangeurs de chaleur (Heat exchangers) et systèmes de refroidissement (chillers) (Section 3.2.6) - Option 3 - Transformateur électrique (Power supply transformer) (Section 4.1.4) - Option 4 - Formation de maintenance Avancé (Chapitre 9) - Option 5 - Services de maintenance préventive, corrective et pièces de rechange nécessaires (Section 12.2) - Option 6 - Extension de garantie d’une année supplémentaire - Le prix du transport, assurance comprise, selon les conditions DAP CEA Grenoble (Convention Incoterms ICC 2020)

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

More from this buyer

Full buyer profile

32 open tenders right now

Who usually wins this buyer's contracts in this sector

Company Wins Total awarded Last win
MATECH ELECTRONIQUE SAS 1 €317,500 Aug 2026
Beneq Oy 1 n/a Jan 2026
CRYO DIFFUSION 1 n/a Jul 2026
EURIS SAS 1 n/a May 2026
Ion Beam Services SAS 1 n/a May 2026

Based on 10 awards with a linked company profile over the last 5 years.

What this buyer has paid before

Based on 10 comparable contracts this buyer awarded in this sector over the last 4 years.

€1
Lower quartile
€1
Median award
€1
Upper quartile

Most recent awards

Award values as published by the official sources. Use them as a guide, not a rule: scope, lots and duration differ between contracts.

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Market context

Avg. open tender · Electrical machinery
€51,831,827
3,116 open across Europe right now
Buyer track record on Aperlena
75 notices tracked · 24 awarded
€5,160,042 in awarded contracts

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