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France - Electromechanical equipment - 300mm Si-SiGe selective etching tool

Original France - Équipement électromécanique - Equipement de 300mm de gravure sélective Si-SiGe - Dry selective_SiSiGe_etching tool

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Open race

No supplier dominates: 5 different companies have won the last 5 comparable contracts from this buyer over 5 years. This is a genuinely open race.

Based on 5 comparable awards by this buyer in this sector over 5 years. Every verdict is recorded before the outcome and graded against the award notice. How we score ourselves.

Summary

Machine-generated summary

CEA Leti, a French research organisation based in France, is procuring a FEOL/MEOL etching tool for its cleanroom. The equipment must process 300mm wafers and enable highly selective and isotropic etching of silicon (Si) and silicon-germanium (SiGe), supporting research on FDSOI 10nm technologies and beyond. Mandatory options cover Process 7 (SiCO spacer etching), Process 8 (spacer etching and SADP) and Level 1 maintenance training. Optional items include heat exchangers and chillers, a power supply transformer, advanced maintenance training and preventive, corrective and spare parts services. Suppliers able to deliver this specialised equipment may bid under the applicable procedure.

Description

Le CEA Leti, pour ses activités de recherche, qui visent à développer les technologies FDSOI 10nm et au-delà (FDSOI10), souhaite faire l’acquisition d’un équipement de gravure FEOL/MEOL pour sa salle-blanche. L’équipement sera capable de traiter des wafers de 300mm et permettra la gravure hautement sélective et isotropique du silicium (Si) et silicium-germanium (SiGe). Il comprend les options à réponses obligatoires suivantes : - Option 1 : Process 7 (gravure du spacer SiCO) - Option 2 :Process 8 (gravure du spacer et SADP) - Option 3 : Formation de maintenance Niveau 1 Ainsi que le coût des options à réponses facultatives : - Option 4 : Échangeurs de chaleur (Heat exchangers) et systèmes de refroidissement (chillers) (Section 3.2.6) - Option 5 : Transformateur électrique (Power supply transformer) (Section 4.1.4) - Option 6 : Formation de maintenance Avancé (Chapitre 9) - Option 7 : Services de maintenance préventive, corrective et pièces de rechange nécessaires (Section 12.2)

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

More from this buyer

Full buyer profile

35 open tenders right now

Who usually wins this buyer's contracts in this sector

Company Wins Total awarded Last win
ASM Europe B.V 1 n/a Jan 2026
CRYO DIFFUSION 1 n/a Mar 2026
SDMS 1 n/a Mar 2026
TESCAN France 1 n/a Apr 2026
TOKYO ÉLECTRON EUROPE LIMITED 1 n/a May 2026

Based on 5 awards with a linked company profile over the last 5 years.

What this buyer has paid before

Based on 5 comparable contracts this buyer awarded in this sector over the last 4 years.

€1
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€1
Median award
€1
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Most recent awards

Award values as published by the official sources. Use them as a guide, not a rule: scope, lots and duration differ between contracts.

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Market context

Avg. open tender · Electrical machinery
€52,625,284
3,053 open across Europe right now
Buyer track record on Aperlena
116 notices tracked · 34 awarded
€88,395,759 in awarded contracts

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