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Aperlena

France - Machines et appareils microélectroniques - Equipement de dépôt LPCVD

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Description

Le CEA Grenoble pour ses activités de recherche visant à développer les technologies SOI d'un diamètre de 10 nm et au-delà, le CEA-LETI souhaite acquérir un système LPCVD (Low Pressure Chemical Vapor Deposition) compact basé sur un seul tube vertical. Ce système devra traiter automatiquement des plaquettes de 300 mm destiné au dépôt de silicium non dopé et dopé (avec du bore ou du phosphore).

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

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Avg. open tender · Electrical machinery
€57,456,864
3,234 open across Europe right now
Buyer track record on Aperlena
110 notices tracked · 32 awarded
€68,918,337 in awarded contracts

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