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TED - Tenders Electronic Daily (Publications Office of the EU) verified 2 days ago Contract notice

France - Microelectronic machines and apparatus - Supply of a deep etching equipment

Original France - Machines et appareils microélectroniques - Fourniture d'un équipement de gravure profonde

Open France Rhône-Alpes Electrical machinery

Buyer CEA Grenoble

Key facts

Published
Procedure
Negotiated procedure
  1. Published

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Summary

Machine-generated summary

CEA-LETI intends to purchase a 200 mm etching tool featuring a 200 mm deep silicon etch chamber. The chamber must perform both Bosch and non-Bosch silicon etch processes, be compatible with fluorinated gases and carry out through-wafer etching. It must automatically process various substrate types without modification or hardware changes: bonded wafers (silicon on SOG glass and silicon on silicon), wafers of different thicknesses, wafers with organic layers on the back side and wafers with etched cavities on the back side. The tool must include an OES end-point detection system, bevel edge protection and Via Reveal end-point detection. A mandatory option covers level 1 maintenance training, with optional items including a chiller, pump, electrical transformer, advanced maintenance training and a one-year warranty extension.

Description

Le CEA-LETI souhaite acquérir un équipement 200 mm avec une chambre de gravure profonde du silicium de 200 mm. La chambre de gravure profonde du silicium doit pouvoir effectuer des processus de gravure Bosch et non Bosch Si, être compatible avec les gaz fluorés et effectuer la gravure à travers la plaquette. Cet équipement doit pouvoir traiter différents types de substrats en mode automatique, sans modification ni changement matériel : plaquettes collées (silicium sur verre SOG et silicium sur silicium), plaquettes d'épaisseurs différentes, plaquettes avec couches organiques au dos et plaquettes avec cavités gravées au dos. L'outil doit être équipé d'un système de détection de fin de processus OES, d'un système de protection des bords biseautés des plaquettes et d'un système de détection de fin de processus pour la gravure Via Reveal. L'option obligatoire: - Option n°1: Formation maintenance niveau 1 Les options facultatives : -Option n°2: Chiller -Option n°3: Pompe -Option n°4: Transformateur électrique -Option n°5: Formation maintenance avancée -Option n°6: Extension de garantie 1 an supplémentaire Le CEA-LETI souhaite acquérir un équipement 200 mm avec une chambre de gravure profonde du silicium de 200 mm. La chambre de gravure profonde du silicium doit pouvoir effectuer des processus de gravure Bosch et non Bosch Si, être compatible avec les gaz fluorés et effectuer la gravure à travers la plaquette. Cet équipement doit pouvoir traiter différents types de substrats en mode automatique, sans modification ni changement matériel : plaquettes collées (silicium sur verre SOG et silicium sur silicium), plaquettes d'épaisseurs différentes, plaquettes avec couches organiques au dos et plaquettes avec cavités gravées au dos. L'outil doit être équipé d'un système de détection de fin de processus OES, d'un système de protection des bords biseautés des plaquettes et d'un système de détection de fin de processus pour la gravure Via Reveal. L'option à chiffrage obligatoire: -Option n°1: Formation maintenance niveau 1 Les options à chiffrage facultatif : -Option n°2 : Chiller -Option n°3 : Pompe -Option n°4 : Transformateur électrique -Option n°5 : Formation Maintenance Avancée -Option n°6 : Extension de garantie 1 an supplémentaire

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

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Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 2 days ago

What this market pays

The buyer has too few awards of its own in this sector, so this is the range of the last 556 awards for Electrical machinery in France.

Median award
€128,484
Middle half of past awards
€62,137 to €290,460

TED - Tenders Electronic Daily (Publications Office of the EU) publishes no value for this notice, so it has no mark on the scale. The official documents may state one.

Award values as published by the official sources. Use them as a guide, not a rule: scope, lots and duration differ between contracts.

CEA Grenoble

France

notices in the register
114
awards
41
awarded in total
€18.7M

Who wins its contracts

Many suppliers
different companies won its awards
35
of the awards went to the three most frequent winners
11%
of its calls state an estimated value
0%

Based on 36 awards with a named winner over the last 3 years. Counted by award, not by value, because lot and framework amounts are not comparable. Concentrated means the three most frequent winners took 65% or more of the awards; many suppliers, under 35% with at least ten different winners.

Competition

tenders per lot on average (open and restricted procedures)
3.8
of those lots received a single tender
25%
of the awards went to companies based in another country
17%

As the official award notices state them, over the last 3 years. Tenders per lot count open and restricted procedures only: in a negotiated procedure or a direct award a single tender is the procedure itself. The country is the one the notice gives for the winner.

This buyer has no award history in this sector yet. Usual winners, Electrical machinery - France

Company Wins Total awarded Last win
REXEL FRANCE 44 €3.4M Sep 2026
SONEPAR FRANCE DISTRIBUTION 22 €1.7M Aug 2026
BLACHERE ILLUMINATION 14 €2.0M Sep 2026
Leblanc illuminations 10 €629,151 Aug 2026
Engie 5 €360,166 Nov 2025

Based on 755 awards with a linked company profile over the last 2 years.

44 open tenders right now

Market context

TED - Tenders Electronic Daily (Publications Office of the EU) publishes no value for this notice, so it cannot be placed among the open notices of its sector. The official documents may state one.

open now in Electrical machinery
3,611
median open notice
€525,500

Who wins in this market

Many suppliers

France · Electrical machinery

different companies won awards here
589
of the awards went to the three most frequent winners
10%
winners of the last 12 months were new here
435 of 457
buyers awarded contracts here
532

Based on 773 awards with a named winner over the last 3 years. Counted by award, not by value, because lot and framework amounts are not comparable. Concentrated means the three most frequent winners took 65% or more of the awards; many suppliers, under 35% with at least ten different winners. New: no award from the same buyer or market in the two years before.

Competition

tenders per lot on average (open and restricted procedures)
2.7
of those lots received a single tender
19%
of the awards went to companies based in another country
9%
of the tenders came from another country
30%

As the official award notices state them, over the last 3 years. Tenders per lot count open and restricted procedures only: in a negotiated procedure or a direct award a single tender is the procedure itself. The country is the one the notice gives for the winner.

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