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France - Microelectronic machines and apparatus - Supply of a 300mm chemical mechanical polishing equipment

Original France - Machines et appareils microélectroniques - Fourniture d’un équipement de 300mm de polissage mécano-chimique

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Key facts

Buyer
CEA Grenoble
Where
France Rhône-Alpes
Procedure
Negotiated procedure The buyer selects candidates, then negotiates the offers before choosing. Full entry Above the EU threshold A contract large enough that EU-wide rules apply and it must be published on TED. Full entry
CPV code The EU's common vocabulary for what is being bought: an eight-digit code every notice carries. Full entry
31712100 Microelectronic machinery and apparatus
Original language
French
Published
Source
via TED - Tenders Electronic Daily (Publications Office of the EU), verified 1 month ago
Notice number
327172-2026
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Summary

Machine-generated summary

The CEA-LETI research institute in Grenoble, France, is procuring a 300mm chemical mechanical polishing (CMP) equipment to support its research on 10nm FD-SOI technologies and beyond. The equipment must polish metal films such as copper and tungsten, barrier materials like tantalum and titanium, and transparent wafers. It must include 4 platens and 2 cleaners to run 2 processes in parallel, latest-generation polishing heads and end-point systems with automatic polishing profile adjustment, and later integrate an in-situ metrology module. The contract includes one mandatory option (one-year warranty extension) and several optional items such as sensors, cooling units, training and transport.

Description

Pour ses activités de recherche visant au développement des technologies FD-SOI 10 nm et au-delà, le CEA-LETI souhaite acquérir un équipement 300mm de polissage mécano-chimique. L’équipement devra pouvoir polir des films métallique tels que le cuivre ou le tungstène ainsi que des matériaux barrières comme le tantale ou le titane. L’équipement devra également être capable de polir des plaques transparentes. Il devra être équipé de 4 plateaux et 2 cleaner pour pouvoir traiter 2 procédés en parallèle. Il devra être équipé des têtes de polissage et des systèmes d’end-point de dernière génération permettant l’ajustement automatique du profil de polissage. L’outil devra par la suite intégrer un module de métrologie in-situ. Le présent marché comporte l'option obligatoire suivante : - Option n°1 : Prolongation de la garantie d’une année supplémentaire. Le présent marché les options facultatives suivantes : - Option n°2 : Fourniture d’un capteur de résidus (§3.1 du cahier des charges), - Option n°3 : Fourniture d’un échangeur de chaleur/refroidisseur (§3.2.6 du cahier des charges), - Option n°4 : Fourniture d’un transformateur électrique (§4.1.3 du cahier des charges), - Option n°5 : Formation de maintenance 1er niveau (§9 du cahier des charges), - Option n°6 : Formation de maintenance avancée (§9 du cahier des charges), - Option n°7 : Le prix du transport, assurance comprise, selon les conditions DAP CEA Grenoble (Convention Incoterms ICC 2020).

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

View the official notice

More from this buyer

Full buyer profile

33 open tenders right now

This buyer has no award history in this sector yet. Usual winners, Electrical machinery - France

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Based on 497 awards with a linked company profile over the last 2 years.

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Market context

Avg. open tender · Electrical machinery
€52,895,083
3,049 open across Europe right now
Buyer track record on Aperlena
78 notices tracked · 26 awarded
€5,160,042 in awarded contracts

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