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Deutschland - Mikroelektronische Maschinen und Geräte - Plasmasystem (IZM-115.1) - PR1115793-2590-P

Awarded Contract award

Key facts

Winner
Evatec Europe GmbH
Buyer
Fraunhofer-Gesellschaft - Einkauf B12
Where
Germany Berlin
Procedure
Open procedure Anyone may submit a bid, in one step, with no pre-selection. Full entry Above the EU threshold A contract large enough that EU-wide rules apply and it must be published on TED. Full entry
CPV code The EU's common vocabulary for what is being bought: an eight-digit code every notice carries. Full entry
31712100 Microelectronic machinery and apparatus
Original language
German
Source
via TED - Tenders Electronic Daily (Publications Office of the EU), verified 1 month ago
Notice number
363665-2026
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  1. Published
  2. Awarded pending

Description

1 Stück: Plasmasystem (IZM-115.1) Die Herstellung sehr feiner RDLs (Redistribution Layers) < 5 µm auf großen organischen Substraten erfordert den Ersatz nasschemischer Verfahren durch Trockenätzen. Aufgrund des stark anisotropen Charakters des Plasmaätzens kann ein Unterfräsen der feinen Cu-Leitung vermieden werden, was den Weg für Strukturen von 2 µm und darunter ebnet. Das Plasmawerkzeug für Panels bis zu 600 mm wird ein ICP-System mit sehr hohen Ätzraten für organische Materialien wie Fotolacke und ABF sein. Im Gegensatz zum bestehenden Plasmasystem, das für präzises Metallätzen optimiert ist, wird das neue ICP-Werkzeug die Entwicklung und Nutzung sehr schneller Ätzzyklen ermöglichen, die mit industriellen Prozessen kompatibel sind.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 month ago

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Market context

Avg. open tender · Electrical machinery
€52,915,858
3,054 open across Europe right now
Buyer track record on Aperlena
385 notices tracked · 181 awarded
€651,275 in awarded contracts

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