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Denmark - Industrial machinery - Delivery and installation of a High ion density etcher for lithium niobate on insulator (LiNbO3, LN)

Original Denmark - Industrial machinery - Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN)

Open Contract notice 20 days left
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Deadline 15 Oct. If it moves, an email when the register sees it. A correction: the same email. Your plan: decide by 1 Oct, questions by 1 Oct, draft by 8 Oct. Log in

  1. Published
  2. Today
  3. Deadline open for 35 days
  4. Awarded pending

The Aperlena Verdict

Open race

No supplier dominates: 4 different companies have won the last 4 comparable contracts from this buyer over 5 years. This is a genuinely open race.

Based on 4 comparable awards by this buyer in this sector over 5 years. Every verdict is recorded before the outcome and graded against the award notice. How we score ourselves.

Summary

Machine-generated summary

DTU Nanolab, the nanofabrication facility of the Technical University of Denmark, is procuring a high ion density source reactive ion etcher for processing 150 mm lithium niobate on insulator wafers. The instrument must deliver stable etch recipes at nanometer and micrometer scales with precise depth control and state-of-the-art profile control, uniformity, selectivity and sidewall smoothness for low-loss optical waveguides. It will be installed in the DTU Nanolab cleanroom, serving over 200 users including commercial clients. Delivery is expected no later than Q4 2027.

Description

DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. At DTU Nanolab there are several research groups and companies working on developing and running small scale production of optical devises on the tools. Therefor the capability of etching smooth optical waveguide, gratings and other low-roughness optical devises are of high importance to us.

Official source

Source: TED - Tenders Electronic Daily (Publications Office of the EU)

Always verify details on the official notice.

Last verified against TED - Tenders Electronic Daily (Publications Office of the EU) 1 week ago

More from this buyer

Full buyer profile

20 open tenders right now

Who usually wins this buyer's contracts in this sector

Company Wins Total awarded Last win
CAMFIL A/S 1 €1.2M May 2026
Aconity3D GmbH 1 €493,740 Nov 2025
DAVEY PRODUCTS 1 €90,000 Aug 2026
Parcitank SA 1 €90,000 Aug 2026

Based on 4 awards with a linked company profile over the last 5 years.

What this buyer has paid before

Based on 5 comparable contracts this buyer awarded in this sector over the last 4 years.

€90,000
Lower quartile
€90,933
Median award
€493,740
Upper quartile

Most recent awards

Award values as published by the official sources. Use them as a guide, not a rule: scope, lots and duration differ between contracts.

Similar tenders

Market context

Avg. open tender · Industrial machinery
€1,951,441
2,383 open across Europe right now
Buyer track record on Aperlena
109 notices tracked · 67 awarded
€50,547,494 in awarded contracts

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